Reliability of grating couplers incorporated on integrated interferometric biosensors
نویسندگان
چکیده
Sub-micronic grating couplers have been integrated on optical waveguides for efficient light in-coupling into interferometric biosensors. Design and fabrication processes are presented as well as the results of the optical characterization and the sensing evaluation. Keywords-Grating couplers; interferometers; biosensors; integrated optics.
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